A novel capacitive pressure sensor based on non-coplanar comb electrodes

Aiming at the problem of the nonlinearity and cavity leads of traditional capacitive pressure sensors, a non-coplanar comb electrode structure is proposed. The variation of the overlap areas of comb electrodes reflects the change in capacitance, thereby improving the linearity of the sensor. At the same time, the non-coplanar comb electrodes are designed outside the cavity, avoiding the extra fabrication process caused by the electrode leads....