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Simultaneous two cross-sectional measurements of NH 3 concentration in bent pipe flow using CT-tunable diode laser absorption spectroscopy

Published on Jan 1, 2019in Journal of Thermal Science and Technology0.686
· DOI :10.1299/jtst.2019jtst0016
Hitoshi Matsui1
Estimated H-index: 1
(Isuzu Motors),
Kazumasa Udagawa1
Estimated H-index: 1
(Isuzu Motors)
+ 1 AuthorsTakahiro Kamimoto5
Estimated H-index: 5
(University of Tokushima)
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#1Daisuke HayashiH-Index: 1
#2Junya NakaiH-Index: 1
Last. Yoshihiro Deguchi (University of Tokushima)H-Index: 12
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Methane (CH4) concentration and temperature distributions were measured in a semiconductor process chamber using computed tomography-tunable diode laser spectroscopy (CT-TDLAS). A semiconductor chamber was designed with 32 laser-paths to collect the infrared spectrum of CH4 with tunable diode laser absorption spectroscopy. Absorptions at wavelength of 1628.1 nm and 1653.7 nm were used to reconstruct CH4 concentration and temperature distributions using computed tomography (CT) calculations. The ...
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