A comprehensive model for transient behavior of tapping mode atomic force microscope

Many investigations have focused on steady-state nonlinear dynamics of cantilevers in tapping mode atomic force microscopy (TM-AFM). However, a transient dynamic model—which is essential for a model-based control design—is still missing. In this paper, we derive a mathematical model which covers both the transient and steady-state behavior. The steady-state response of the proposed model has been validated with existing theories. Its transient...