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Broad-Area Surface Nano-Patterning by Ion Beam Sputtering
Emmett Randel
5
,
Carmen S. Menoni
25
,
Matt P. Harrison
5
Bulletin of the American Physical Society
Published
: Oct 20, 2017
Source
Basic Info
References
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Paper Fields
scanning tunneling
vapor deposition
chemical mechanical
vat photopolymerization
chemical vapor
design fabrication
hybrid
silicon nitride
wet chemical etching
Paper Details
Title
Broad-Area Surface Nano-Patterning by Ion Beam Sputtering
Published Date
Oct 20, 2017
Journal
Bulletin of the American Physical Society
Notes
History
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