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Broad-Area Surface Nano-Patterning by Ion Beam Sputtering
Emmett Randel
5
,
Carmen S. Menoni
38
,
...,
Matt P. Harrison
5
View all 4 authors
Bulletin of the American Physical Society
Published
: Oct 20, 2017
Source
Basic Info
References
Citations
Paper Fields
Optics
Physics
Ion
Composite material
Focused ion beam
Beam (structure)
Nanotechnology
Thin film
Materials science
Sputtering
Geometry
Surface (topology)
Nano-
Mathematics
Ion beam
Quantum mechanics
Paper Details
Title
Broad-Area Surface Nano-Patterning by Ion Beam Sputtering
Published Date
Oct 20, 2017
Journal
Bulletin of the American Physical Society
Notes
History
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