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Broad-Area Surface Nano-Patterning by Ion Beam Sputtering
Emmett Randel
5
,
Carmen S. Menoni
40
,
...,
Matt P. Harrison
5
View all 4 authors
Bulletin of the American Physical Society
Published
: Oct 20, 2017
Source
Basic Info
References
Citations
Paper Fields
Physics
Nanotechnology
Mathematics
Optics
Beam (structure)
Ion
Composite material
Focused ion beam
Thin film
Materials science
Surface (topology)
Sputtering
Geometry
Nano-
Quantum mechanics
Ion beam
Paper Details
Title
Broad-Area Surface Nano-Patterning by Ion Beam Sputtering
Published Date
Oct 20, 2017
Journal
Bulletin of the American Physical Society
Notes
History
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