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Original paper
Broad-Area Surface Nano-Patterning by Ion Beam Sputtering
Emmett Randel
5
,
Carmen S. Menoni
39
,
Matt P. Harrison
Bulletin of the American Physical Society
Published
: Oct 20, 2017
Source
Basic Info
References
Citations
Paper Topics
reactive ion
nanoimprint lithography
etch rate
molar concentration
etching rate
silicon substrates
paper substrate
chelating agent
surface imaging
periodic surface
Paper Details
Title
Broad-Area Surface Nano-Patterning by Ion Beam Sputtering
Published Date
Oct 20, 2017
Journal
Bulletin of the American Physical Society
Notes
History
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