Excellent mechanical, tribological and anti-corrosive performance of novel Ti-DLC nanocomposite thin films prepared via magnetron sputtering method

Ti-doped diamond-like carbon nanocomposite thin films with different Ti contents are prepared by closed field unbalanced magnetron sputtering. Designed Ti target current increases from 0.3A to 1.0A. The effect of Ti content on microstructures and properties is investigated. The phases of nano-TiC and amorphous carbon are confirmed. The film (containing less than 50% sp3 C content) deposited with a Ti target current of 0.4A obtains the highest...