A chip-level oven-controlled system used to improve accuracy of silicon piezoresistive pressure sensor

Volume: 143, Pages: 1 - 10
Published: Sep 1, 2019
Abstract
High precision is an important indicator for the silicon piezoresistive pressure sensor, which is deeply affected by the ambient temperature. This paper presented a chip-level oven-controlled system to operate the silicon piezoresistive pressure sensor at a constant temperature. However, the changes in ambient temperature still affect the temperature of the silicon piezoresistive pressure sensor due to the non-coplanar temperature control and...
Paper Details
Title
A chip-level oven-controlled system used to improve accuracy of silicon piezoresistive pressure sensor
Published Date
Sep 1, 2019
Volume
143
Pages
1 - 10
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