A chip-level oven-controlled system used to improve accuracy of silicon piezoresistive pressure sensor
Abstract
High precision is an important indicator for the silicon piezoresistive pressure sensor, which is deeply affected by the ambient temperature. This paper presented a chip-level oven-controlled system to operate the silicon piezoresistive pressure sensor at a constant temperature. However, the changes in ambient temperature still affect the temperature of the silicon piezoresistive pressure sensor due to the non-coplanar temperature control and...
Paper Details
Title
A chip-level oven-controlled system used to improve accuracy of silicon piezoresistive pressure sensor
Published Date
Sep 1, 2019
Journal
Volume
143
Pages
1 - 10
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