Effect of composition and high-temperature annealing on the local deformation behavior of silicon oxycarbides

Silicon oxycarbides with varying compositions were investigated concerning their elastic and plastic properties. Additionally, the impact of thermal annealing on their elastic properties was assessed. Phase separation of SiOC seems to have no significant impact on Young’s modulus (high values of β-SiC compensate the low values of the vitreous silica matrix) and hardness. However, it leads to an increase in Poisson’s ratio, indicating an increase...