Size‐Controlled Si Nanocrystals Fabricated by Electron Beam Evaporation

Multilayers consisting of silicon nanocrystals (Si NCs) and SiO 2 are successfully fabricated by electron beam evaporation, using pure Si and SiO 2 targets in an oxygen‐rich atmosphere for alternately depositing silicon‐rich oxide (SRO) layers and SiO 2 barriers, respectively. A post‐deposition annealing process is carried out at different temperatures in order to achieve the Si precipitation in the form of nanocrystals. The stoichiometry of the...