3D Nanofabrication of SiOC Ceramic Structures

Shaping ceramic materials at the nanoscale in 3D is a phenomenal engineering challenge, that can offer new opportunities in a number of industrial applications, including metamaterials, nano‐electromechanical systems, photonic crystals, and damage‐tolerant lightweight materials. 3D fabrication of sub‐micrometer ceramic structures can be performed by two‐photon laser writing of a preceramic polymer. However, polymer conversion to a fully ceramic...