First-Principles Molecular Dynamics Simulations of O 2 Oxidation in 4H-SiC/SiO 2 ~ Formation and Diffusion of C Clusters ~
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Paper Details
Title
First-Principles Molecular Dynamics Simulations of O 2 Oxidation in 4H-SiC/SiO 2 ~ Formation and Diffusion of C Clusters ~
Published Date
Feb 8, 2018
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