A micromachined differential probe for on-wafer measurements in the WM-1295 (140–220 GHz) band

This paper describes the first-reported development of a micromachined differential probe for direct on-wafer measurements operating in the WM-1295 (140–220 GHz) frequency band. Design and fabrication of the probe, which includes integrated circuitry for converting the input of a single-ended vector network analyzer to differential mode, are described and an on-wafer calibration procedure for extracting the probe mixed-mode scattering...