Synthesis of boron/nitrogen-incorporated diamond-like carbon films by pulsed laser deposition using nitrogen gas and a boron-containing graphite target

Volume: 56, Issue: 10, Pages: 105501 - 105501
Published: Sep 4, 2017
Abstract
We have deposited boron/nitrogen-incorporated diamond-like carbon (B–N-DLC) films by pulsed laser deposition (PLD) using N2 gas and a B-containing graphite target, and compared the mechanical, tribological, electrical, and surface properties of the B–N-DLC films with those of pure DLC, boron-incorporated DLC (B-DLC), and nitrogen-incorporated DLC (N-DLC) films prepared by PLD. The B-DLC film had a much higher critical load than the pure DLC. The...
Paper Details
Title
Synthesis of boron/nitrogen-incorporated diamond-like carbon films by pulsed laser deposition using nitrogen gas and a boron-containing graphite target
Published Date
Sep 4, 2017
Volume
56
Issue
10
Pages
105501 - 105501
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