Silicon Nitride Capacitive Chemical Sensor for Phosphate Ion Detection Based on Copper Phthalocyanine – Acrylate‐polymer

In this work, we report the development of a highly sensitive capacitance chemical sensor based on a copper C,C,C,C‐ tetra‐carboxylic phthalocyanine‐acrylate polymer adduct (Cu(II)TCPc‐PAA) for phosphate ions detection. A capacitance silicon nitride substrate based Al−Cu/Si‐p/SiO 2 /Si 3 N 4 structure was used as transducer. These materials have provided good stability of electrochemical measurements. The functionalized silicon‐based transducers...