Original paper
Silicon Nitride Capacitive Chemical Sensor for Phosphate Ion Detection Based on Copper Phthalocyanine – Acrylate‐polymer
Abstract
In this work, we report the development of a highly sensitive capacitance chemical sensor based on a copper C,C,C,C‐ tetra‐carboxylic phthalocyanine‐acrylate polymer adduct (Cu(II)TCPc‐PAA) for phosphate ions detection. A capacitance silicon nitride substrate based Al−Cu/Si‐p/SiO 2 /Si 3 N 4 structure was used as transducer. These materials have provided good stability of electrochemical measurements. The functionalized silicon‐based transducers...
Paper Details
Title
Silicon Nitride Capacitive Chemical Sensor for Phosphate Ion Detection Based on Copper Phthalocyanine – Acrylate‐polymer
Published Date
Mar 23, 2017
Journal
Volume
29
Issue
6
Pages
1586 - 1595
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Notes
History