Manganese half-sandwich complexes as metal-organic chemical vapor deposition precursors for manganese-based thin films
Abstract
null null The synthesis of compounds [Mn(η5–C5H4SiMe3)(CO)3] (1), [Mn(η5–C5H3-1-SiMe3-3-Me)(CO)3] (2), [Mn(η5–C5H4tBu)(CO)3] (3), [Mn(η5–C5Me5)(CO)3] (4) and [Mn(η5–C5H7)(CO)3] (5) and their potential use as metal-organic chemical vapor deposition (MOCVD) precursors for the deposition of manganese-based layers is reported. The thermal behavior of 1–5 was studied by thermogravimetry showing that these compounds evaporate in the temperature range...
Paper Details
Title
Manganese half-sandwich complexes as metal-organic chemical vapor deposition precursors for manganese-based thin films
Published Date
Nov 30, 2016
Journal
Volume
619
Pages
265 - 272
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History