Modulation period of Ag deposition on co-sputtered TiN-Ag leading to different microstructures: Implication on mechanical properties and living cells growth

Ag/TiN-Ag composite multilayers were deposited on Si and Ti-6Al-4V substrates using a multi-target magnetron co-sputtering system. X-ray diffraction (XRD) and transmission electron microscopy (TEM) indicated that the Ag/TiN-Ag composite multilayers exhibited a weaker TiN textures with the smaller modulation period (Λ), which proved the smaller Λ can block the growth of columnar grain and particle, inducing a smoother surface and smaller...