Flexible Wireless Wall Temperature Sensor for Unsteady Thermal Field

We present a novel flexible wireless wall temperature sensor with high spatio- temporal resolution and its performance evaluation in an unsteady thermal field. A base part of the sensor is made of thermally-stable polyimide and the copper films. Using a Si hard mask fabricated by standard lithography and DRIE process, 1 mm-sized sensing resistor is sputtered on the copper coil. We enhance the time response for each measurement by reducing the...