Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

This work aims to develop novel techniques, including low energy end-hall ion (EDH) source, nitrogen and silicon doping, to enhance the adhesion strength of Diamond-like carbon (DLC) on Polyethylene Terephthalate (PET) to address their major application issues. For this purpose, Nitrogen doped DLC (N-DLC) and Silicon doped DLC (Si-DLC) thin films with different compositions were prepared on PET substrates using EDHI beam deposition. The...