Original paper

Characterization of diamond wire-cutting performance for lifetime estimation and process optimization

Volume: 30, Issue: 2, Pages: 847 - 852
Published: Feb 1, 2016
Abstract
Diamond abrasive-coated wire is a tool for the precise multi-wire sawing of mono-crystal ingots to manufacture substrates. This tool is used to cut hard materials such as silicon carbide, gallium nitride, sapphire and silicon. The cutting performance of diamond wires strongly influences the accuracy of substrates in terms of roughness, total thickness variation and BOW. Nonetheless, changes in cutting performance as a result of gradual wear...
Paper Details
Title
Characterization of diamond wire-cutting performance for lifetime estimation and process optimization
Published Date
Feb 1, 2016
Volume
30
Issue
2
Pages
847 - 852
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