Plasma production for material processing and control of plasma parameters.

Volume: 39, Issue: 7, Pages: 368 - 374
Published: Jan 1, 1988
Abstract
Weakly ionized plasmas produced by gas discharge are widely used in material processing. Production and control of such plasmas are current interests.In this paper, methods of producing plasma by gas discharge are classified into three groups-electron beam, do diode and ratio frequency (including microwave) -in accordance with the main characteristics of the discharge based on plasma physics. Some comments on various methods of producing plasma...
Paper Details
Title
Plasma production for material processing and control of plasma parameters.
Published Date
Jan 1, 1988
Volume
39
Issue
7
Pages
368 - 374
Citation AnalysisPro
  • Scinapse’s Top 10 Citation Journals & Affiliations graph reveals the quality and authenticity of citations received by a paper.
  • Discover whether citations have been inflated due to self-citations, or if citations include institutional bias.