Integrated strain sensor for micromachined terahertz on-wafer probe
Published: Jun 1, 2013
Abstract
This paper introduces an improved method for monitoring and controlling the contact condition of terahertz on-wafer probes. This method enables accurate contact force measurement without modification to the standard probe station. Repeatable probe contact force is crucial for RF measurement repeatability and can be achieved by properly monitoring and controlling the strain generated at designated positions on the terahertz probe due to probe...
Paper Details
Title
Integrated strain sensor for micromachined terahertz on-wafer probe
Published Date
Jun 1, 2013
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