Uniformity of Silicon Microcrystallinity in Large Area RF Capacitive Reactors

Volume: 16, Issue: 8, Pages: 687 - 691
Published: Dec 1, 2008
Abstract
Keywords: microcrystalline silicon; large area; uniformity Reference CRPP-ARTICLE-2008-028doi:10.1002/pip.857View record in Web of Science Record created on 2008-12-15, modified on...
Paper Details
Title
Uniformity of Silicon Microcrystallinity in Large Area RF Capacitive Reactors
Published Date
Dec 1, 2008
Volume
16
Issue
8
Pages
687 - 691
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