Macroscopic control of plasma polymerization processes
Abstract
Plasma polymerization covers a broad range of plasma deposits from soft to hard coatings. Nanoscale coatings are formed within a dry and eco-friendly process on different substrate materials and structures. To gain a deeper insight into plasma polymerization, a macroscopic approach using the concept of chemical quasi-equilibria might be useful. Following this macroscopic approach, the reaction parameter power input per gas flow W / F , which...
Paper Details
Title
Macroscopic control of plasma polymerization processes
Published Date
Jan 1, 2008
Journal
Volume
80
Issue
9
Pages
1893 - 1900
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