Ternary and quarternary TiSiN and TiSiCN nanocomposite coatings obtained by Chemical Vapor Deposition

TiN and TiCxNy are commercial CVD coatings widely used for cutting tools. A promising route for improving their performance is the addition of silicon. Therefore the main objective of this work is the preparation of TiSiN and TiSiCN coatings with a nanocomposite structure offering a higher hardness as well as an improved oxidation and wear resistance. New low pressure CVD processes in the range 800 °C–900 °C were developed for the successful...