Original paper

Yield optimization using advanced statistical correlation methods

Published: Oct 1, 2014
Abstract
This work presents a novel yield optimization methodology based on establishing a strong correlation between a group of fails and an adjustable process parameter. The core of the methodology comprises three advanced statistical correlation methods. The first method performs multivariate correlation analysis to uncover linear correlation relationships between groups of fails and measurements of a process parameter. The second method partitions a...
Paper Details
Title
Yield optimization using advanced statistical correlation methods
Published Date
Oct 1, 2014
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