Mechanisms of Plasma Polymerization – Reviewed from a Chemical Point of View

Several reaction mechanisms have been proposed for the formation of plasma polymers, such as monomer fragmentation followed by poly‐recombination into randomly structured and crosslinked films; fragmentation, accompanied by the formation of acetylene or other film‐forming intermediates and deposition of polystyrene‐like material; plasma‐initiation of a radical chain‐growth polymerization; and ion‐molecule reactions, as well as ionic chain‐growth...