Monolithic microfabricated valves and pumps by multilayer soft lithography

Science56.90
Volume: 288, Issue: 5463, Pages: 113 - 116
Published: Apr 7, 2000
Abstract
Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer soft lithography, with which devices consisting of multiple layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves,...
Paper Details
Title
Monolithic microfabricated valves and pumps by multilayer soft lithography
Published Date
Apr 7, 2000
Journal
Volume
288
Issue
5463
Pages
113 - 116
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