A novel fused sensor for photo- and ion-sensing

Volume: 106, Issue: 2, Pages: 614 - 618
Published: May 13, 2005
Abstract
A novel sensor device, comprising of fused photo-sensors and ion-sensors, is proposed. We describe how a prototype device was successfully fabricated using a CMOS process. In the proposed device, a photo-sensor and an ion-sensor are fused in the same pixel, enabling the photo-signal and the ion concentration density to be detected simultaneously in the same sensing area. Therefore, the relationship between light distribution and ion distribution...
Paper Details
Title
A novel fused sensor for photo- and ion-sensing
Published Date
May 13, 2005
Volume
106
Issue
2
Pages
614 - 618
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