Vapor-phase silanization of oxidized porous silicon for stabilizing composition and photoluminescence
Abstract
A vapor-phase deposition approach to the silanization modification of the oxidized porous silicon (PSi) surface using (CH3O)3Si(CH2)3NH2 has been exploited. Standard clean (SC)-1 (NH3H2O/H2O2/H2O, 1:1:5,v/v) and SC-2 [HCl/H2O2/H2O (1:1:6,v/v)] solutions are utilized for the first time to obtain oxidized PSi and have been proved to be a very efficient combination for creating Si–OH species on the PSi surface. After the modification, an amine...
Paper Details
Title
Vapor-phase silanization of oxidized porous silicon for stabilizing composition and photoluminescence
Published Date
Jun 1, 2009
Journal
Volume
105
Issue
11
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