Properties of TiSiN coatings deposited by hybrid HiPIMS and pulsed-DC magnetron co-sputtering

TiSiN nanocomposites coatings were synthesized for the first time by a hybrid deposition technique where high power impulse (HiPIMS) and pulsed-DC (PDCMS) magnetron co-sputtering were used for Ti and Si deposition respectively in an Ar + N2 atmosphere. For the Ti target, the deposition parameters were fixed, while the current applied to the Si target ranged from 0 to 0.9 A. Thus, the Si content in the films was adjusted from 0 to 8.8 at.% Si to...