Front-side illuminated CMOS spectral pixel response and modulation transfer function characterization: impact of pixel layout details and pixel depletion volume
Abstract
We have measured the pixel response and derived the spectral modulation transfer function (MTF) of a front-side
illuminated complementary-metal-oxide-semiconductor (CMOS) focal plane array at wavelengths of 440, 544, 633, and
905 nanometers using a spot scanning technique. The spot scanning apparatus utilized a confocal microscope
configuration with a spot diameter about 1.4 μm (wavelength dependent) to scan the CMOS imager 9-μm pixel pitch...
Paper Details
Title
Front-side illuminated CMOS spectral pixel response and modulation transfer function characterization: impact of pixel layout details and pixel depletion volume
Published Date
Aug 20, 2009
Journal
Volume
7405
Pages
192 - 202
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Notes
History