High-throughput, high-damage-threshold broadband beam splitter for high-order harmonics in the extreme-ultraviolet region

We demonstrate a high-throughput and high-damage-threshold beam splitter for high-order harmonics in the soft-x-ray region that uses Si and (or) SiC plates set at Brewster's angle with respect to the pump wavelength. The beam splitters are guaranteed to have a damage threshold of at least 0.8 TW/cm2 (average power density, 0.25 W/cm2) and an attenuation rate of 10(-4)-10(-5) for a 30-fs pump pulse. The measured reflection efficiency at the 27th...