Application of optical force measurement to mode characterization of atomic force microscopy nanomachining

Atomic force microscopy is often used not only to acquire the sample surface topography at the subnanometer scale but also to measure forces on the surface during imaging. This study aims to develop a practical measurement scheme of the actual scratching forces exerted during atomic force microscopy nanoscratching using a simple optical microscope setup. The measurement results are utilized to analyze the mode characteristics of atomic force...