Original paper
Application of optical force measurement to mode characterization of atomic force microscopy nanomachining
Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture1.90
Volume: 227, Issue: 8, Pages: 1188 - 1198
Published: May 23, 2013
Abstract
Atomic force microscopy is often used not only to acquire the sample surface topography at the subnanometer scale but also to measure forces on the surface during imaging. This study aims to develop a practical measurement scheme of the actual scratching forces exerted during atomic force microscopy nanoscratching using a simple optical microscope setup. The measurement results are utilized to analyze the mode characteristics of atomic force...
Paper Details
Title
Application of optical force measurement to mode characterization of atomic force microscopy nanomachining
Published Date
May 23, 2013
Journal
Volume
227
Issue
8
Pages
1188 - 1198
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Notes
History