Study of high-tech process furnace using inherently safer design strategies (I) temperature distribution model and process effect

High-tech industries, such as those producing semiconductor and TFT-LCD (Thin Film Transistor Liquid Crystal Display), have recently become the most important economic activities in Taiwan. Each of these industries has a complete chain of supply from raw material production, production pre-processing, product manufacturing, to waste handling. Any company in the chain is a critical component, since any accidents of fire, explosion, gas leakage,...