Original paper
Synthesis of cubic silicon nitride
Abstract
Silicon nitride (Si3N4) is used in a variety of important technological applications. The high fracture toughness, hardness and wear resistance of Si3N4-based ceramics are exploited in cutting tools and anti-friction bearings1; in electronic applications, Si3N4 is used as an insulating, masking and passivating material2. Two polymorphs of silicon nitride are known, both of hexagonal structure: α- and β-Si3N4. Here we report the synthesis of a...
Paper Details
Title
Synthesis of cubic silicon nitride
Published Date
Jul 1, 1999
Journal
Volume
400
Issue
6742
Pages
340 - 342
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Notes
History