Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

http://scitation.aip.org/content/avs/journal/jvst
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Journal Details
Title
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
ISSN
2166-2746
Webpage
http://scitation.aip.org/content/avs/journal/jvst
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3,735Publications

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28kCitations
　
Publications
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All3,73528k
Original3,29823.5k
Review3684,035
Others69484
Papers0
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