Journal of vacuum science & technology

Journal Fields
Journal Details
Title
Journal of vacuum science & technology
ISSN
0734-2101
Publisher
American Institute of Physics
Journal Stats Detail

Publications by article type

23.4kPublications

Citations by article type

411kCitations
　
Publications
Citations
All23.4k411k
Original18.8k321k
Review2,91473.1k
Others1,69317.6k
Papers0
Publication Type
Published year
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