Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Journal Details
Title
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Publisher
AIP Publishing
Journal Stats Detail
Publications by article type
115Publications
Citations by article type
11Citations
Publications | Citations | |
---|---|---|
All | 115 | 11 |
Original | 8 | 11 |
Review | ||
Others | 107 |
Papers0
Publication Type
Published year
~
Notes
History