Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Journal Details
Title
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Publisher
AIP Publishing
Journal Stats Detail
Publications by article type
115Publications
Citations by article type
11Citations
Publications | Citations | |
|---|---|---|
| All | 115 | 11 |
| Original | 8 | 11 |
| Review | ||
| Others | 107 |
Papers0
Publication Type
Published year
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Notes
History