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IEEE/ASME Journal of Microelectromechanical Systems
1
Publications
Journal Fields
Comb drive
Actuator
Stiffness
Stroke (engine)
Parallelogram
Journal Details
Title
IEEE/ASME Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers
Papers
0
Publication Type
Any publication type
Published year
~
Notes
History
View all history