information about Atomic layer deposition field
Field Hierarchy
Parent | |||
---|---|---|---|
Physics 33.7M papers | Chemistry 29.5M papers | Materials science 19M papers | Quantum mechanics 13.6M papers |
Organic chemistry 13.2M papers | Composite material 8.9M papers | Nanotechnology 4.3M papers | Layer (electronics) 1.4M papers |
Thin film 517k papers | |||
Current | |||
Atomic layer deposition 22.5k papers | |||
Child | |||
Atomic layer epitaxy 1,895 papers |
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