information about Atomic layer deposition field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Physics 31.7M papers | Chemistry 28.4M papers | Materials science 18.2M papers | Quantum mechanics 13.1M papers |
Organic chemistry 12.8M papers | Composite material 8.6M papers | Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers |
Thin film 502k papers | |||
| Current | |||
Atomic layer deposition 21.9k papers | |||
| Child | |||
Atomic layer epitaxy 1,825 papers | |||
Trends
Notes
History