information about Remote plasma field
Field Hierarchy
Parent | |||
---|---|---|---|
Physics 31.7M papers | Chemistry 28.4M papers | Materials science 18.2M papers | Quantum mechanics 13.1M papers |
Organic chemistry 12.8M papers | Nanotechnology 4.2M papers | Optoelectronics 3.7M papers | Nuclear physics 1.9M papers |
Plasma 650k papers | Chemical vapor deposition 112k papers | ||
Current | |||
Remote plasma 940 papers | |||
Child |
Trends
Notes
History