Remote plasma

https://www.wikidata.org/wiki/Q18393999

Field Hierarchy

Parent
Physics 33.6M papers	Chemistry 29.4M papers	Materials science 19M papers	Quantum mechanics 13.6M papers
Organic chemistry 13.1M papers	Nanotechnology 4.2M papers	Optoelectronics 3.8M papers	Nuclear physics 2.1M papers
Plasma 700k papers		Chemical vapor deposition 114k papers
Current
Remote plasma 950 papers
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History