Lithography

https://www.wikidata.org/wiki/Q133036

Field Hierarchy

Parent
Physics 33.6M papers	Materials science 19M papers	Art 14.6M papers	Optics 8.2M papers
Optoelectronics 3.8M papers		Visual arts 1.8M papers
Current
Lithography 62k papers
Child
Process window 3,893 papers		Optical proximity correction 3,051 papers

Trends

Notes

History