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Wei-Ting Kary Chein
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Published on Jan 1, 2014
Dulin Wang , Randy Kang1
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+ 3 AuthorsWei-Ting Kary Chein
This paper introduces a guidance, which is displayed by a flow chart, for the process reliability data comparison of advanced semiconductor technologies. The present semiconductor manufacturing process is very complex and its quality control requirement also becomes more and more strict. Different reliability data may analyzed by different methods considering both engineering and statistical evidence so we can best assess process reliability performance not only considering the lifetime requirem...
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